Surface profile and topography filtering by Legendre polynomials

نویسندگان

چکیده

Abstract A surface filtering method based on Legendre polynomials is proposed that can be used to separate form and roughness of profiles areal topographies. The filter has been designed in such a way it well approaches the properties Gaussian filter, especially center measured region. Theoretical measurement examples show there little difference zero- second order regression filters, both obtained topography calculated profile- parameters. Compared filters becomes gradually weaker outside profile/area, while for Regression constant over but at edge region within half L-nesting index distance. Especially cases where nesting equal or not much smaller than dimensions area, as default case according ISO 25178-2:2012, principal advantage polynomial removal an integral part filtering, so does interact with need carried out separately. Also reference plane principally unchanged after application this filter. Some applications are shown fast numerical implementation given.

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ژورنال

عنوان ژورنال: Surface topography

سال: 2021

ISSN: ['2051-672X']

DOI: https://doi.org/10.1088/2051-672x/abe214